CRYSTALLOGRAPHIC CHARACTERISTICS AND ELECTRICAL-PROPERTIES OF AL-DOPED ZNO THIN-FILMS PREPARED BY IONIZED DEPOSITION

被引：46
作者：
KUROYANAGI, A
机构：
来源：
JOURNAL OF APPLIED PHYSICS | 1989年 / 66卷 / 11期
关键词：
D O I：
10.1063/1.343700
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
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页码：5492 / 5497
页数：6
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