MICROROBOTS AND MICROMECHANICAL SYSTEMS

被引：272
作者：
TRIMMER, WSN
机构：
来源：
SENSORS AND ACTUATORS | 1989年 / 19卷 / 03期
关键词：
D O I：
10.1016/0250-6874(89)87079-9
中图分类号：
O65 [分析化学];
学科分类号：
070302 ; 081704 ;
摘要：
引用
收藏
页码：267 / 287
页数：21
相关论文
共 40 条
[11]  
FEELY WE, 1988, JUN P IEEE SOL STAT, P13
[12]  
FEURY AM, 1986, 1986 IEEE SOL STAT S
[13]  
Feynman RP., 1960, THERES PLENTY ROOM B
[14]   THE FABRICATION OF AN ELECTROSTATIC LINEAR-ACTUATOR BY SILICON MICROMACHINING [J].
FUJITA, H ;
OMODAKA, A .
IEEE TRANSACTIONS ON ELECTRON DEVICES, 1988, 35 (06) :731-734
[15]  
FUJITA H, 1987, 4TH INT C SOL STAT S, P861
[16]  
GABRIEL KJ, 1987, 4TH INT C SOL STAT S, P853
[17]   FINE-GRAINED POLYSILICON FILMS WITH BUILT-IN TENSILE STRAIN [J].
GUCKEL, H ;
BURNS, DW ;
VISSER, CCG ;
TILMANS, HAC ;
DEROO, D .
IEEE TRANSACTIONS ON ELECTRON DEVICES, 1988, 35 (06) :800-801
[18]   ELECTROMECHANICAL DEVICES UTILIZING THIN SI DIAPHRAGMS [J].
GUCKEL, H ;
LARSEN, S ;
LAGALLY, MG ;
MOORE, G ;
MILLER, JB ;
WILEY, JD .
APPLIED PHYSICS LETTERS, 1977, 31 (09) :618-619
[19]  
HANFUSA H, 1978, OCT IFAC S INF CONTR, P127
[20]   POLYCRYSTALLINE SILICON MICROMECHANICAL BEAMS [J].
HOWE, RT ;
MULLER, RS .
JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1983, 130 (06) :1420-1423
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