共 40 条
[1]
BARTH PW, 1985, 3RD P INT C SOL STAT, P371
[3]
BASSOUS E, 1978, IEEE T ELECTRON DEV, V25, P178
[4]
ANISOTROPIC ETCHING OF SILICON
[J].
IEEE TRANSACTIONS ON ELECTRON DEVICES,
1978, 25 (10)
:1185-1193
[6]
Drexler K. E., 1986, ENGINES OF CREATION
[7]
EHRFELD W, 1987, NOV IEEE MICR ROB TE
[8]
ESASHI M, 1987, 4TH INT C SOL STAT S, P839
[10]
FAN LS, 1987, 4TH INT C SOL STAT S, P849