REACTIVE MAGNETRON SPUTTERING ON GLASS

被引：0
|
作者：
ZEGA, B
机构：
来源：
THIN SOLID FILMS | 1981年 / 77卷 / 1-3期
关键词：
D O I：
10.1016/0040-6090(81)90382-5
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
引用
收藏
页码：271 / 271
页数：1
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