PHOTODEPOSITION OF METAL-FILMS WITH ULTRAVIOLET-LASER LIGHT

被引：109

作者：

EHRLICH, DJ

OSGOOD, RM

DEUTSCH, TF

机构：

来源：

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY | 1982年 / 21卷 / 01期

关键词：

D O I：

10.1116/1.571724

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：23 / 32

页数：10

共 20 条

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[9] LASER MICROPHOTOCHEMISTRY FOR USE IN SOLID-STATE ELECTRONICS [J].

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[10] ONE-STEP REPAIR OF TRANSPARENT DEFECTS IN HARD-SURFACE PHOTOLITHOGRAPHIC MASKS VIA LASER PHOTODEPOSITION [J].

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