FABRICATION OF ZNO PIEZOELECTRIC FILM BY PLANAR MAGNETRON RF SPUTTERING EQUIPMENT

被引：0

作者：

SHIOSAKI, T ^{[1
]}

OOISHI, M ^{[1
]}

OHNISHI, S ^{[1
]}

KAWABATA, A ^{[1
]}

机构：

[1] KYOTO UNIV,FAC ENGN,DEPT ELECTR,KYOTO 606,JAPAN

来源：

FERROELECTRICS | 1978年 / 19卷 / 3-4期

关键词：

D O I：

暂无

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

引用

页码：166 / 166

页数：1

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