FABRICATION OF ZNO PIEZOELECTRIC FILM BY PLANAR MAGNETRON RF SPUTTERING EQUIPMENT

被引：0
作者：
SHIOSAKI, T [1 ]
OOISHI, M [1 ]
OHNISHI, S [1 ]
KAWABATA, A [1 ]
机构：
[1] KYOTO UNIV,FAC ENGN,DEPT ELECTR,KYOTO 606,JAPAN
来源：
FERROELECTRICS | 1978年 / 19卷 / 3-4期
关键词：
D O I：
暂无
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
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页码：166 / 166
页数：1
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