SCANNING TUNNELING MICROSCOPY AS A TOOL TO STUDY SURFACE-ROUGHNESS OF SPUTTERED THIN-FILMS

被引:21
作者
SCHONENBERGER, C [1 ]
ALVARADO, SF [1 ]
ORTIZ, C [1 ]
机构
[1] IBM CORP,ALMADEN RES CTR,DIV RES,SAN JOSE,CA 95120
关键词
D O I
10.1063/1.343967
中图分类号
O59 [应用物理学];
学科分类号
摘要
引用
收藏
页码:4258 / 4261
页数:4
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