EMBOSSED GRATING LEAD CHALCOGENIDE DISTRIBUTED-FEEDBACK LASERS

被引:12
|
作者
SCHLERETH, KH [1 ]
BOTTNER, H [1 ]
机构
[1] FRAUNHOFER INST PHYS MESSTECH,W-7800 FREIBURG,GERMANY
来源
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B | 1992年 / 10卷 / 01期
关键词
D O I
10.1116/1.586309
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
The successful preparation of double-heterostructure (DH) distributed-feedback (DFB) PbEuSe lasers using an embossing technique for the DFB sub-micrometer grating is reported here for the first time. The submicrometer grating was performed in (111) oriented silicon wafers by holographic exposure and argon ion milling. Using a hydrostatic press this grating was embossed into a lead chalcogenide wafer, covered by a DH structure grown by molecular beam epitaxy. Lasers made from wafers with grating periodicities of 0.678 and 0.755-mu-m show DFB characteristics at the corresponding emission wavenumbers around 1420 and 1590 cm-1.
引用
收藏
页码:114 / 117
页数:4
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