RESONANT SENSORS AND APPLICATIONS

被引：32
作者：
HAUPTMANN, P
机构：
[1] Technische Universität Otto von Guericke Magdeburg, Magdeburg
来源：
SENSORS AND ACTUATORS A-PHYSICAL | 1991年 / 26卷 / 1-3期
关键词：
D O I：
10.1016/0924-4247(91)87018-X
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
Resonant sensors configured to have a mechanical resonance frequency are a subject of special practical interest. They are sensors with outputs based on a quasidigital frequency signal. This is a great advantage over conventional analog sensors. This paper reviews a wide range of such sensors, including micromachined, gravimetric and large-volume resonator sensors. They are compared and their properties are discussed.
引用
收藏
页码：371 / 377
页数：7
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