METHOD TO MEASURE THE PRECIPITATED AND TOTAL OXYGEN CONCENTRATION IN SILICON

被引：25

作者：

JASTRZEBSKI, L

ZANZUCCHI, P

THEBAULT, D

LAGOWSKI, J

机构：

来源：

JOURNAL OF THE ELECTROCHEMICAL SOCIETY | 1982年 / 129卷 / 07期

关键词：

D O I：

10.1149/1.2124224

中图分类号：

O646 [电化学、电解、磁化学];

学科分类号：

081704 ;

摘要：

引用

页码：1638 / 1641

页数：4

共 23 条

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[4]

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