PROSPECTS FOR WSI - A MANUFACTURING PERSPECTIVE

被引：8

作者：

MALY, W

机构：

来源：

COMPUTER | 1992年 / 25卷 / 04期

基金：

美国国家科学基金会;

关键词：

D O I：

10.1109/2.129050

中图分类号：

TP3 [计算技术、计算机技术];

学科分类号：

0812 ;

摘要：

[No abstract available]

引用

页码：58 / 65

页数：8

共 10 条

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FLORES, GE ;

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IEEE SPECTRUM, 1991, 28 (10) :24-27

[3] MODELING OF LITHOGRAPHY RELATED YIELD LOSSES FOR CAD OF VLSI CIRCUITS [J].

MALY, W .

IEEE TRANSACTIONS ON COMPUTER-AIDED DESIGN OF INTEGRATED CIRCUITS AND SYSTEMS, 1985, 4 (03) :166-177

[4] COMPUTER-AIDED-DESIGN FOR VLSI CIRCUIT MANUFACTURABILITY [J].

MALY, W .

PROCEEDINGS OF THE IEEE, 1990, 78 (02) :356-392

[5]

MASUCHARA T, 1991, I ELECTRONICS INFO E, V74

[6]

MCDONALD JF, 1984, IEEE SPECTRUM OCT, P32

[7]

MENON V, 1990, P TECHCON 90, P224

[8] INTEGRATED-CIRCUIT YIELD STATISTICS [J].

STAPPER, CH ;

ARMSTRONG, FM ;

SAJI, K .

PROCEEDINGS OF THE IEEE, 1983, 71 (04) :453-470

[9]

TARUI Y, 1991, IEEE CIRCUITS DE MAR, P44

[10]

TEWKSBURY SK, 1989, WAFER LEVEL SYSTEM I

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