共 50 条
- [24] Multiply-charged ion beam induced dry etching of semiconductor materials MATERIALS SCIENCE AND ENGINEERING B-SOLID STATE MATERIALS FOR ADVANCED TECHNOLOGY, 2000, 74 (1-3): : 40 - 44
- [28] CW-OPERATED DUOPLASMATRON MULTIPLY-CHARGED ION-SOURCE NUCLEAR INSTRUMENTS & METHODS, 1975, 127 (03): : 459 - 469