COMBINED EFFECTS OF CRUCIBLE ROTATION AND HORIZONTAL MAGNETIC-FIELD ON DOPANT CONCENTRATION IN A CZOCHRALSKI MELT

被引:29
作者
OZOE, H
IWAMOTO, M
机构
[1] Institute of Advanced Material Study, Kyushu University, Kasuga, 816
关键词
D O I
10.1016/0022-0248(94)90292-5
中图分类号
O7 [晶体学];
学科分类号
0702 ; 070205 ; 0703 ; 080501 ;
摘要
Three-dimensional numerical computations were carried out for the melt in a Czochralski system under a lateral magnetic field at Gr = 10(7), Pr = 0.01, Re(rod) = 1620, Re(cru) = 0 or -3240, Ha = 0-1000 and Sc = 10. The fully three-dimensional velocity components, temperature and concentration profiles were obtained. The rotation of a crucible was found to decrease extensively the heat transfer rate and the concentration of dopant both in the melt and at the phase-change interface. Further application of strong magnetic field was found to increase the dopant concentration slightly due to the additional friction with the rotating crucible.
引用
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页码:236 / 244
页数:9
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