PREPARATION OF COMPOSITIONALLY MODULATED BI-SR-CA-CU-O MULTILAYERED FILMS BY PLASMA CONTROLLED SPUTTERING

被引：10
作者：
KOINUMA, H
NAGATA, H
TAKANO, A
KAWASAKI, M
YOSHIMOTO, M
机构：
[1] SUMITOMO CEMENT CO LTD, CENT RES LAB, FUNABASHI, CHIBA 274, JAPAN
[2] UNIV TOKYO, FAC ENGN, DEPT IND CHEM, BUNKYO KU, TOKYO 113, JAPAN
来源：
JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS & EXPRESS LETTERS | 1988年 / 27卷 / 10期
关键词：
D O I：
10.1143/JJAP.27.L1887
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
引用
收藏
页码：L1887 / L1889
页数：3
相关论文
共 3 条
[1]   HEAT-RESISTANCE OF HYDROGENATED AMORPHOUS-SILICON FILMS PREPARED BY COMPRESSED MAGNETIC FIELD-MAGNETRON SPUTTERING WITH HE AND AR GASES [J].
HATA, T ;
KAMIDE, Y ;
NAKAGAWA, S ;
HATTORI, K .
JOURNAL OF APPLIED PHYSICS, 1986, 59 (10) :3604-3606
[2]   SUPERCONDUCTING PROPERTIES OF HIGH-TC BI-SR-CA-CU-O THIN-FILMS [J].
ICHIKAWA, Y ;
ADACHI, H ;
HIROCHI, K ;
SETSUNE, K ;
HATTA, S ;
WASA, K .
PHYSICAL REVIEW B, 1988, 38 (01) :765-767
[3]   HIGH-TC PHASE PROMOTED AND STABILIZED IN THE BI, PB-SR-CA-CU-O SYSTEM [J].
TAKANO, M ;
TAKADA, J ;
ODA, K ;
KITAGUCHI, H ;
MIURA, Y ;
IKEDA, Y ;
TOMII, Y ;
MAZAKI, H .
JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS, 1988, 27 (06) :L1041-L1043
1