CONE FORMATION ON METAL TARGETS DURING SPUTTERING

被引：226

作者：

WEHNER, GK

HAJICEK, DJ

机构：

来源：

关键词：

D O I：

10.1063/1.1660158

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：1145 / &

共 9 条

[1]

BEHRISCH R, 1964, ERGEB EXAKT NATURWIS, V35, P384

[2]

Guenterschulze A., 1942, Z PHYS, V119, P685

[3]

HEIL O, 1965, DA28043AMC00429 CONT

[4] MICROTOPOGRAPHY OF SURFACES ERODED BY ION-BOMBARDMENT [J].

STEWART, ADG ;

THOMPSON, MW .

[5] INFLUENCE OF THE ANGLE OF INCIDENCE ON SPUTTERING YIELDS [J].

WEHNER, G .

[6] CONTROLLED SPUTTERING OF METALS BY LOW-ENERGY HG IONS [J].

WEHNER, GK .

PHYSICAL REVIEW, 1956, 102 (03) :690-704

WEHNER, GK .

PHYSICAL REVIEW, 1957, 108 (01) :35-45

[8] MOMENTUM TRANSFER IN SPUTTERING BY ION BOMBARDMENT [J].

WEHNER, GK .

[9]

1966, NONR1589 CONTR