CHARACTERIZATION OF CHEMICAL BONDING AND PHYSICAL CHARACTERISTICS OF DIAMOND-LIKE AMORPHOUS-CARBON AND DIAMOND FILMS

被引：49
作者：
BHUSHAN, B
KELLOCK, AJ
CHO, NH
AGER, JW
机构：
[1] IBM CORP,DIV RES,ALMADEN RES CTR,SAN JOSE,CA 95120
[2] UNIV CALIF BERKELEY,LAWRENCE BERKELEY LAB,DIV MAT & CHEM SCI,BERKELEY,CA 94720
来源：
JOURNAL OF MATERIALS RESEARCH | 1992年 / 7卷 / 02期
关键词：
D O I：
10.1557/JMR.1992.0404
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
Diamond-like (amorphous) carbon (DLC) films were prepared by dc magnetron sputtering and plasma enhanced chemical vapor deposition (PECVD) and diamond films were prepared by microwave plasma enhanced chemical vapor deposition (MPECVD). For the first time, chemical and mechanical characterization of the films from each category are carried out systematically and a comparison of the chemical and physical properties is provided. We find that DLC coatings produced by PECVD are superior in microhardness and modulus of elasticity to those produced by sputtering. PECVD films contain a larger fraction of sp3-bonding than the sputtered hydrogenated carbon films. Chemical and physical properties of the diamond films appear to be close to those of bulk diamond.
引用
收藏
页码：404 / 410
页数：7
相关论文
共 28 条
[1]   STRUCTURE AND MORPHOLOGY OF RF SPUTTERED CARBON OVERLAYER FILMS [J].
AGARWAL, S .
IEEE TRANSACTIONS ON MAGNETICS, 1985, 21 (05) :1527-1529
[2]   SPATIALLY RESOLVED RAMAN STUDIES OF DIAMOND FILMS GROWN BY CHEMICAL VAPOR-DEPOSITION [J].
AGER, JW ;
VEIRS, DK ;
ROSENBLATT, GM .
PHYSICAL REVIEW B, 1991, 43 (08) :6491-6499
[3]   LOW-PRESSURE, METASTABLE GROWTH OF DIAMOND AND DIAMONDLIKE PHASES [J].
ANGUS, JC ;
HAYMAN, CC .
SCIENCE, 1988, 241 (4868) :913-921
[4]  
BADZIAN AR, 1987, ADDITIONS PHYSIQUE, V14, P63
[5]   MODELING STUDIES OF AMORPHOUS-CARBON [J].
BEEMAN, D ;
SILVERMAN, J ;
LYNDS, R ;
ANDERSON, MR .
PHYSICAL REVIEW B, 1984, 30 (02) :870-875
[6]  
BHUSHAN B, 1990, TRIBOLOGY MECHANICS
[7]  
BHUSHAN B, 1991, HDB TRIBOLOGY MATERI
[8]   CHEMICAL-STRUCTURE AND PHYSICAL-PROPERTIES OF DIAMOND-LIKE AMORPHOUS-CARBON FILMS PREPARED BY MAGNETRON SPUTTERING [J].
CHO, NH ;
KRISHNAN, KM ;
VEIRS, DK ;
RUBIN, MD ;
HOPPER, CB ;
BHUSHAN, B ;
BOGY, DB .
JOURNAL OF MATERIALS RESEARCH, 1990, 5 (11) :2543-2554
[9]  
CHO NH, 1991, UNPUB J VAC SCI TECH
[10]   USE OF RAMAN-SCATTERING TO INVESTIGATE DISORDER AND CRYSTALLITE FORMATION IN AS-DEPOSITED AND ANNEALED CARBON-FILMS [J].
DILLON, RO ;
WOOLLAM, JA ;
KATKANANT, V .
PHYSICAL REVIEW B, 1984, 29 (06) :3482-3489
123