共 50 条
- [3] Electron temperature control with grid bias in inductively coupled argon plasma Phys Plasmas, 3 (1017-1028):
- [6] Electron energy distribution function measurements and plasma parameters in inductively coupled argon plasma PLASMA SOURCES SCIENCE & TECHNOLOGY, 2002, 11 (04): : 525 - 543
- [9] Electron energy distributions in inductively coupled plasma of argon JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS, 2001, 40 (12): : 7052 - 7060
- [10] Electron Density and Electron Temperature Control with a Magnetic Field and a Grid in Inductively Coupled Argon Plasma Plasma Chemistry and Plasma Processing, 2023, 43 : 381 - 400