PLASMA-AIDED MANUFACTURING

被引：50
|
作者：
SHOHET, JL
机构：
[1] Engineering Research Center for Plasma-Aided Manufacturing, University of Wisconsin, Madison.
来源：
IEEE TRANSACTIONS ON PLASMA SCIENCE | 1991年 / 19卷 / 05期
基金：
美国国家科学基金会;
关键词：
D O I：
10.1109/27.108405
中图分类号：
O35 [流体力学]; O53 [等离子体物理学];
学科分类号：
070204 ; 080103 ; 080704 ;
摘要：
Plasma-aided manufacturing is used for producing new materials with unusual and superior properties, for developing new chemical compounds and processes, for machining, and for altering and refining materials and surfaces. Plasma-aided manufacturing has direct applications to semiconductor fabrication, materials synthesis, welding, lighting, polymers, anticorrosion coatings, machine tools, metallurgy, electrical and electronics devices, hazardous waste removal, high-performance ceramics, and many other items in both the high-technology and the more traditional industries in the United States.
引用
收藏
页码：725 / 733
页数：9
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