CHARACTERIZATION OF ANODIZED ALUMINIUM-COPPER VAPOR-DEPOSITED FILMS BY ION SCATTERING SPECTROMETRY

被引:11
作者
STREHBLOW, HH [1 ]
MALM, DL [1 ]
机构
[1] BELL TEL LABS INC,MURRAY HILL,NJ 07974
关键词
D O I
10.1016/S0010-938X(79)80053-0
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
Composition-depth profiles for anodized films, 100 Å thick, formed under galvanostatic conditions on vapour-deposited aluminium containing 1-10 at.% copper have been obtained via Ion Scattering Spectrometry (ISS). The O{single bond}Al ratio found for the anodic layer corresponds to that for Al2O3 and the Cu concentration in the aluminium metal measured near the oxide-metal interface was similar to that for non-oxidized alloys. Additionally, no metallic impurities (> 0.1 at.%) were detectable in the oxide layer or the alloy. © 1979 Pergamon Press Ltd.
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页码:469 / 473
页数:5
相关论文
共 6 条
[1]   REDUCTION OF ELECTROMIGRATION IN ALUMINUM FILMS BY COPPER DOPING [J].
AMES, I ;
DHEURLE, FM ;
HORSTMANN, RE .
IBM JOURNAL OF RESEARCH AND DEVELOPMENT, 1970, 14 (04) :461-+
[2]   ION SCATTERING SPECTROMETRY [J].
GOFF, RF .
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1973, 10 (02) :355-358
[3]   MOBILITY OF METALLIC FOREIGN ATOMS DURING ANODIC-OXIDATION OF ALUMINUM [J].
MACKINTOSH, WD ;
BROWN, F ;
PLATTNER, HH .
JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1974, 121 (10) :1281-1286
[4]  
MALM DL, 1978, FEB PITTSB C APPL SP
[5]   EXAMINATION OF ALUMINUM COPPER-FILMS DURING ANODIC-OXIDATION .1. CORROSION STUDIES [J].
STREHBLOW, HH ;
DOHERTY, CJ .
JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1978, 125 (01) :30-33
[6]   EXAMINATION OF ALUMINUM-COPPER FILMS DURING GALVANOSTATIC FORMATION OF ANODIC OXIDE .2. RUTHERFORD BACKSCATTERING AND DEPTH PROFILING [J].
STREHBLOW, HH ;
MELLIARSMITH, CM ;
AUGUSTYNIAK, WM .
JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1978, 125 (06) :915-919