PHOTOABLATION OF POLYIMIDE WITH IR AND UV-LASER RADIATION

被引：37

作者：

BRAUN, R ^{[1
]}

NOWAK, R ^{[1
]}

HESS, P ^{[1
]}

OETZMANN, H ^{[1
]}

SCHMIDT, C ^{[1
]}

机构：

[1] ASEA BROWN BOVERI,CORP RES HEIDELBERG,W-6900 HEIDELBERG,GERMANY

来源：

APPLIED SURFACE SCIENCE | 1989年 / 43卷

关键词：

D O I：

10.1016/0169-4332(89)90238-9

中图分类号：

O64 [物理化学（理论化学）、化学物理学];

学科分类号：

070304 ; 081704 ;

摘要：

引用

页码：352 / 357

页数：6

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