A DIRECT-CURRENT PLASMA DISCHARGE CLEANING METHOD TO ELIMINATE BACKGROUND SIGNALS IN SECONDARY ION MASS-SPECTROMETRY

被引：6

作者：

HUES, SM

COLTON, RJ

WYATT, JR

机构：

来源：

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS | 1989年 / 7卷 / 05期

关键词：

D O I：

10.1116/1.576327

中图分类号：

TB3 [工程材料学];

学科分类号：

0805 ; 080502 ;

摘要：

引用

页码：3126 / 3128

页数：3

共 8 条

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[6]

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