共 27 条
[1]
BISCHEL WK, 1983, AIP CONF PROC, P181
[2]
BRINKMANN U, 1990, LAMBDA HIGHLIGHTS, V22, P4
[3]
BRINKMANN U, 1990, LAMBADA HIGHLIGHTS, V25, P1
[4]
CONTACT LITHOGRAPHY AT 157 NM WITH AN F2 EXCIMER LASER
[J].
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B,
1983, 1 (04)
:1186-1189
[5]
DAVIS G, 1984, UNPUB ANN REPORT RUT, pB33
[9]
Ishchenko V. N., 1986, Soviet Journal of Quantum Electronics, V16, P707, DOI 10.1070/QE1986v016n05ABEH006868