BONDING AND DIFFUSION AT AL AND AU INTERFACES WITH CDS

被引：38

作者：

BRILLSON, LJ ^{[1
]}

BAUER, RS ^{[1
]}

BACHRACH, RZ ^{[1
]}

MCMENAMIN, JC ^{[1
]}

机构：

[1] XEROX CORP, PALO ALTO RES CTR, PALO ALTO, CA 94305 USA

来源：

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY | 1980年 / 17卷 / 01期

关键词：

D O I：

10.1116/1.570487

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：476 / 480

页数：5

共 21 条

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