THE MEASUREMENT OF ELASTIC STRESSES AND ENERGY IN CUBIC SINGLE-CRYSTAL FILMS BY X-RAY-DIFFRACTION

被引：7
作者：
RAO, SI
HOUSKA, CR
机构：
来源：
JOURNAL OF APPLIED PHYSICS | 1981年 / 52卷 / 10期
关键词：
D O I：
10.1063/1.328536
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
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页码：6322 / 6327
页数：6
相关论文
共 7 条
[1]  
Hilley ME., 1971, RESIDUAL STRESS MEAS
[2]  
JAMES MR, 1980, TREATISE MATERIALS S, V19, P25
[3]  
Lekhnitskii S.G., 1963, THEORY ELASTICITY AN
[4]   THERMALLY INDUCED STRAINS IN EVAPORATED FILMS [J].
VOOK, RW ;
WITT, F .
JOURNAL OF APPLIED PHYSICS, 1965, 36 (07) :2169-&
[5]   X-RAY DETERMINATION OF STRAIN AND TEXTURE IN SPUTTERED MOLYBDENUM AND TITANIUM FILMS ON SILICON [J].
YESENSKY, RJ ;
RAO, V ;
HOUSKA, CR .
THIN SOLID FILMS, 1981, 79 (01) :27-38
[6]  
1963, AM I PHYSICS HDB, P3
[7]  
1975, THERMOPHYSICAL PROPE
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