BARIUM SILICATE FILMS FOR INTEGRATED OPTICAL CIRCUITS

被引：24

作者：

GOELL, JE ^{[1
]}

机构：

[1] BELL LABS, CRAWFORD HILL LAB, HOLMDEL, NJ 07733 USA

来源：

APPLIED OPTICS | 1973年 / 12卷 / 04期

关键词：

D O I：

10.1364/AO.12.000737

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

引用

页码：737 / 742

页数：6

共 24 条

[1]

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[3]

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[5] ELECTRON-RESIST FABRICATION OF BENDS AND COUPLERS FOR INTEGRATED OPTICAL CIRCUITS [J].

GOELL, JE .

APPLIED OPTICS, 1973, 12 (04) :729-736

[6] INTEGRATED OPTICAL CIRCUITS [J].

GOELL, JE ;

STANDLEY, RD .

PROCEEDINGS OF THE INSTITUTE OF ELECTRICAL AND ELECTRONICS ENGINEERS, 1970, 58 (10) :1504-+

[7] SPUTTERED GLASS WAVEGUIDE FOR INTEGRATED OPTICAL CIRCUITS [J].

GOELL, JE ;

STANDLEY, RD .

BELL SYSTEM TECHNICAL JOURNAL, 1969, 48 (10) :3445-+

[8] PRODUCTION AND ANNEALING OF COLOR CENTERS IN RF SPUTTERED SIO2 FILMS [J].

HICKMOTT, TW .

JOURNAL OF APPLIED PHYSICS, 1971, 42 (06) :2543-&

[9] RADIATION DAMAGE IN RADIO-FREQUENCY-SPUTTERED SIO2 FILMS [J].

HICKMOTT, TW .

APPLIED PHYSICS LETTERS, 1969, 15 (07) :232-&

[10] SPUTTERING STUDIES OF INSULATORS BY MEANS OF LANGMUIR PROBES [J].

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WEHNER, GK .

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