LIQUID-PHASE EPITAXY APPARATUS FOR MULTIPLE LAYERS UTILIZING CENTRIFUGAL FORCES

被引：8
|
作者：
BAUSER, E [1 ]
SCHMIDT, L [1 ]
LOECHNER, KS [1 ]
RAABE, E [1 ]
机构：
[1] MAX PLANCK INST FESTKORPERFORSCH,D-7000 STUTTGART 80,FED REP GER
来源：
JAPANESE JOURNAL OF APPLIED PHYSICS | 1977年 / 16卷
关键词：
D O I：
10.7567/JJAPS.16S1.457
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
引用
收藏
页码：457 / 460
页数：4
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