THICKNESS DISTRIBUTION IN THIN-FILM

被引：4
|
作者：
HATTORI, T [1 ]
机构：
[1] MUSASHI INST TECHNOL,FAC ENGN,DEPT ELECT ENGN,SETAGAYA KU,TOKYO,JAPAN
来源：
JAPANESE JOURNAL OF APPLIED PHYSICS | 1977年 / 16卷 / 04期
关键词：
D O I：
10.1143/JJAP.16.635
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
引用
收藏
页码：635 / 636
页数：2
相关论文
共 50 条
  • [1] THIN-FILM THICKNESS MONITOR
    不详
    SOLID STATE TECHNOLOGY, 1990, 33 (06) : 48 - 50
  • [2] THIN-FILM THICKNESS MEASUREMENTS
    KHATNIKOV, VI
    PRIBORY I TEKHNIKA EKSPERIMENTA, 1974, (06): : 194 - 195
  • [3] Characterization of thin-film thickness
    Pourjamal, Sara
    Mantynen, Henrik
    Jaanson, Priit
    Rosu, Dana Maria
    Hertwig, Andreas
    Manoocheri, Farshid
    Ikonen, Erkki
    METROLOGIA, 2014, 51 (06) : S302 - S308
  • [4] Simulation of the thin-film thickness distribution for an OLED thermal evaporation process
    Lee, Eungki
    VACUUM, 2009, 83 (05) : 848 - 852
  • [5] AN OPTICAL THIN-FILM THICKNESS MONITOR
    CHITNIS, VT
    PUNTAMBEKAR, PN
    VACUUM, 1981, 31 (02) : 113 - 115
  • [6] THICKNESS DEPENDENCE OF THIN-FILM CONDUCTIVITY
    LEDZION, J
    KIERUL, J
    PHYSICA STATUS SOLIDI A-APPLIED RESEARCH, 1989, 114 (02): : 545 - 550
  • [7] THIN-FILM THICKNESS STEP GAUGE
    GUPTA, SK
    KAPIL, AK
    SINGAL, CM
    SRIVASTAVA, VK
    PRAMANA, 1976, 7 (06) : 397 - 400
  • [8] THIN-FILM THICKNESS MONITOR SHUTTER
    BAILEY, WE
    HATFIELD, LL
    MARSHALL, BJ
    REVIEW OF SCIENTIFIC INSTRUMENTS, 1978, 49 (04): : 546 - 547
  • [9] MEASUREMENT OF FILM THICKNESS OF THIN-FILM RESISTANCE THERMOMETERS
    MCCAA, DJ
    AIAA JOURNAL, 1968, 6 (04) : 747 - &
  • [10] THE DEPENDENCE OF THE INVERSION LAYER THICKNESS ON THE FILM THICKNESS IN THIN-FILM SOI STRUCTURES
    XIA, YW
    WANG, SW
    CHINESE PHYSICS, 1991, 11 (03): : 716 - 719
12345