COLLISION THEORIES OF CATHODE SPUTTERING OF METALS AT LOW ION ENERGIES

被引：12
作者：
HENSCHKE, EB
机构：
来源：
PHYSICAL REVIEW | 1961年 / 121卷 / 05期
关键词：
D O I：
10.1103/PhysRev.121.1286
中图分类号：
O4 [物理学];
学科分类号：
0702 ;
摘要：
引用
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页码：1286 / &
相关论文
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