NEW METHOD OF LIGHT-INDUCED DEPOSITION OF METAL-FILMS ON INSULATOR-ON-SEMICONDUCTOR SUBSTRATES

被引：4
作者：
KRAWCZYK, SK
KUMAR, SN
机构：
来源：
APPLIED PHYSICS LETTERS | 1987年 / 50卷 / 04期
关键词：
D O I：
10.1063/1.97665
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
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页码：215 / 217
页数：3
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