UNDERSTANDING OF SURFACE-CHEMISTRY OF III-V METALORGANIC CHEMICAL VAPOR-DEPOSITION REACTANTS

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作者：
LUTH, H
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JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A | 1989年 / 7卷 / 03期
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TB3 [工程材料学];
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0805 ; 080502 ;
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页码：696 / 700
页数：5
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