NUMERICAL-ANALYSIS OF VARIOUS CROSS SHEET RESISTOR TEST STRUCTURES

被引：62
作者：
DAVID, JM
BUEHLER, MG
机构：
来源：
SOLID-STATE ELECTRONICS | 1977年 / 20卷 / 06期
关键词：
D O I：
10.1016/S0038-1101(77)81011-3
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
引用
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页码：539 / 543
页数：5
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