THE ROLE OF HYDROGEN IN AMORPHOUS-SILICON FILMS DEPOSITED BY THE PYROLYTIC DECOMPOSITION OF SILANE

被引：7
作者：
HEY, P
SERAPHIN, BO
机构：
来源：
SOLAR ENERGY MATERIALS | 1982年 / 8卷 / 1-3期
关键词：
D O I：
10.1016/0165-1633(82)90064-8
中图分类号：
TE [石油、天然气工业]; TK [能源与动力工程];
学科分类号：
0807 ; 0820 ;
摘要：
引用
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页码：215 / 230
页数：16
相关论文
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