AN IONIZATION GAUGE WITH A COLD ELECTRON SOURCE FOR AN EXTREMELY HIGH-VACUUM

被引：21
|
作者：
OSHIMA, C
SATOH, T
OTUKA, A
机构：
[1] Department of Applied Physics, Waseda University, Shinjyuku, Tokyo, 169
来源：
VACUUM | 1993年 / 44卷 / 5-7期
关键词：
D O I：
10.1016/0042-207X(93)90104-I
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
An ionization gauge with a cold electron source has been constructed, and its performance has been evaluated. The Spindt emitter used as the cold source has shown the stable emission current of 1 mA, and the low outgas condition has been obtained after the long operation of 1 mA emission for approximately 1 month. Between the cold and hot electron sources, no large difference concerning the stability of the emission and the outgas has been detected in extremely high vacuum of 1 x 10(-10) Pa, and the sensitivity of the gauge with the cold electron source (1.9 x 10(10) cps Pa-1 at 0.1 mA reduced for nitrogen gas) was slightly higher than that of the gauge with the hot electron source.
引用
收藏
页码：595 / 597
页数：3
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