LASER DEPOSITION OF EPITAXIAL TITANIUM NITRIDE FILMS ON (100) MGO

被引:27
作者
BIUNNO, N [1 ]
NARAYAN, J [1 ]
SRIVATSA, AR [1 ]
HOLLAND, OW [1 ]
机构
[1] OAK RIDGE NATL LAB,DIV SOLID STATE,OAK RIDGE,TN 37831
关键词
D O I
10.1063/1.101881
中图分类号
O59 [应用物理学];
学科分类号
摘要
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页码:405 / 407
页数:3
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