DETERMINATION OF THE STANDARD DEVIATION OF HEIGHT ON A ROUGH-SURFACE USING INTERFERENCE MICROSCOPY

被引：16

作者：

CHANDLEY, PJ

机构：

[1] Blackett Laboratory, Imperial College

来源：

OPTICAL AND QUANTUM ELECTRONICS | 1979年 / 11卷 / 05期

关键词：

D O I：

10.1007/BF00619822

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

When a rough surface is viewed in an interference microscope with tilt fringes introduced, the effect of the roughness is to reduce the average visibility of the tilt fringes. The relationship between the standard deviation of surface height and the average visibility of the tilt fringes is derived, and experimental results are presented of measurements made on ground glass surfaces using a Linnik interference microscope. © 1979 Chapman and Hall Ltd.

引用

页码：407 / 412

页数：6

共 5 条

[1] BOOKER HG, 1949, PHILOS T R SOC LON A, V242, P579
[2] RE-FORMULATION OF SOME RESULTS OF BECKMANN,P FOR SCATTERING FROM ROUGH SURFACES
CHANDLEY, PJ
WELFORD, WT
[J]. OPTICAL AND QUANTUM ELECTRONICS, 1975, 7 (05) : 393 - 397
[3] SURFACE-ROUGHNESS MEASUREMENTS FROM COHERENT-LIGHT SCATTERING
CHANDLEY, PJ
[J]. OPTICAL AND QUANTUM ELECTRONICS, 1976, 8 (04) : 323 - 327
[4] FRANCON M, 1966, OPTICAL INTERFEROMET
[5] SOME ASPECTS OF DIFFRACTION THEORY AND THEIR APPLICATION TO THE IONOSPHERE
RATCLIFFE, JA
[J]. REPORTS ON PROGRESS IN PHYSICS, 1956, 19 : 188 - 267

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