DRY PROCESS TECHNOLOGY FOR HIGH-FREQUENCY SAW DEVICES

被引：0
|
作者：
YUHARA, A
MIZUTANI, T
HOSAKA, N
YAMADA, J
KOBAYASHI, S
机构：
来源：
IEEE 1989 ULTRASONICS SYMPOSIUM : PROCEEDINGS, VOLS 1 AND 2 | 1989年
关键词：
D O I：
暂无
中图分类号：
O42 [声学];
学科分类号：
070206 ; 082403 ;
摘要：
引用
收藏
页码：343 / 349
页数：7
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