INTEGRATED-CIRCUITS AS VIEWED WITH AN ACOUSTIC MICROSCOPE

被引：29
|
作者：
LEMONS, RA [1 ]
QUATE, CF [1 ]
机构：
[1] STANFORD UNIV,MICROWAVE LAB,STANFORD,CA 94305
来源：
APPLIED PHYSICS LETTERS | 1974年 / 25卷 / 05期
关键词：
D O I：
10.1063/1.1655459
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
引用
收藏
页码：251 / 253
页数：3
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