INTEGRATED-CIRCUITS AS VIEWED WITH AN ACOUSTIC MICROSCOPE

被引：29

作者：

LEMONS, RA ^{[1
]}

QUATE, CF ^{[1
]}

机构：

[1] STANFORD UNIV,MICROWAVE LAB,STANFORD,CA 94305

来源：

关键词：

D O I：

10.1063/1.1655459

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：251 / 253

页数：3

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