MAGNETIC OXIDE FILMS

被引:90
作者
MEE, JE
PULLIAM, GR
ARCHER, JL
BESSER, PJ
机构
[1] Autonetics Division of North American Rockwell, Anaheim, Calif.
关键词
D O I
10.1109/TMAG.1969.1066642
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
Polycrystalline and epitaxial magnetic oxide films have been fabricated by several investigators. This paper deals predominantly with epitaxial films grown by chemical vapor deposition. The majority of the discussion is concerned with substrates, the deposition process, and film characterization. Where possible, comparisons are made with bulk crystals and with films produced by other fabrication techniques. © 1969 IEEE. All rights reserved.
引用
收藏
页码:717 / +
页数:1
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