LIFETIME CONTROL BY PALLADIUM DIFFUSION IN SILICON

被引：15
作者：
SO, L
WHITELEY, JS
GHANDHI, SK
BALIGA, BJ
机构：
来源：
SOLID-STATE ELECTRONICS | 1978年 / 21卷 / 06期
关键词：
D O I：
10.1016/0038-1101(78)90314-3
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
引用
收藏
页码：887 / 890
页数：4
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