NEW DEGRADATION MECHANISM ASSOCIATED WITH HYDROGEN IN BIPOLAR-TRANSISTORS UNDER HOT-CARRIER STRESS

被引:24
作者
GOPI, PK [1 ]
LI, GP [1 ]
SONEK, GJ [1 ]
DUNKLEY, J [1 ]
HANNAMAN, D [1 ]
PATTERSON, J [1 ]
WILLARD, S [1 ]
机构
[1] SILICON SYST INC,TUSTIN,CA 92680
关键词
D O I
10.1063/1.109783
中图分类号
O59 [应用物理学];
学科分类号
摘要
Avalanche hot carrier induced bipolar device degradation as a function of temperature, current density, and time is reported. The observed drift in emitter-base breakdown voltage (V(ebo)) is found to be well correlated to changes in forward base (I(b)) and collector (I(c)) currents. The model of hydrogen release from the Si-SiO2 interface and its subsequent passivation of base dopants during hot carrier stress is proposed to account for such a correlation.
引用
收藏
页码:1237 / 1239
页数:3
相关论文
共 11 条
[1]   MODELING HOT-CARRIER EFFECTS IN POLYSILICON EMITTER BIPOLAR-TRANSISTORS [J].
BURNETT, JD ;
HU, CM .
IEEE TRANSACTIONS ON ELECTRON DEVICES, 1988, 35 (12) :2238-2244
[2]  
Dunkley J., 1992, International Electron Devices Meeting 1992. Technical Digest (Cat. No.92CH3211-0), P785, DOI 10.1109/IEDM.1992.307475
[3]   HYDROGEN IN CRYSTALLINE SEMICONDUCTORS - A REVIEW OF EXPERIMENTAL RESULTS [J].
JOHNSON, NM ;
DOLAND, C ;
PONCE, F ;
WALKER, J ;
ANDERSON, G .
PHYSICA B, 1991, 170 (1-4) :3-20
[4]  
JOSHI SP, 1987, IEDM, P182
[5]  
NIITSU Y, 1991, INT REL PHY, P193, DOI 10.1109/RELPHY.1991.146013
[6]  
Pankove J.I, 1991, SEMICONDUCT SEMIMET, V34, P91
[7]  
Petersen S. A., 1985, International Electron Devices Meeting. Technical Digest (Cat. No. 85CH2252-5), P22
[8]   DEACTIVATION OF THE BORON ACCEPTOR IN SILICON BY HYDROGEN [J].
SAH, CT ;
SUN, JY ;
TZOU, JJ .
APPLIED PHYSICS LETTERS, 1983, 43 (02) :204-206
[9]   JUNCTION DEGRADATION IN BIPOLAR-TRANSISTORS AND THE RELIABILITY IMPOSED CONSTRAINTS TO SCALING AND DESIGN [J].
TANG, DD ;
HACKBARTH, E .
IEEE TRANSACTIONS ON ELECTRON DEVICES, 1988, 35 (12) :2101-2107
[10]   DISSOCIATION-ENERGIES OF SHALLOW-ACCEPTOR HYDROGEN PAIRS IN SILICON [J].
ZUNDEL, T ;
WEBER, J .
PHYSICAL REVIEW B, 1989, 39 (18) :13549-13552