COPPER PATTERNING ON DIELECTRICS BY LASER WRITING IN LIQUID SOLUTION

被引：18

作者：

MINI, L

GIACONIA, C

ARNONE, C

机构：

[1] Dipartimento di Ingegneria Elettrica, IAIF-CNR, Università di Palermo, 90128 Palermo, Viale delle Scienze

来源：

APPLIED PHYSICS LETTERS | 1994年 / 64卷 / 25期

关键词：

D O I：

10.1063/1.111292

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

A technique suitable for laser induced deposition of copper on LiNbO3 and glass is presented. Deposition is achieved from Cu salt solution mixed with glycerol, after coating the surface with a very thin metal film. High resolution and low electrical resistivity can be achieved, using laser power levels in the 20-mW range. The technique can be used for electrode and interconnect fabrication in integrated optical devices, as well as mask repair or microelectronics applications.

引用

页码：3404 / 3406

页数：3

共 3 条

[1] LASER-INDUCED METAL-DEPOSITION ON SEMICONDUCTORS FROM LIQUID ELECTROLYTES [J].