RATE LIMITATION AT THE SURFACE FOR IMPURITY DIFFUSION IN SEMICONDUCTORS

被引：56

作者：

SMITS, FM

MILLER, RC

机构：

来源：

PHYSICAL REVIEW | 1956年 / 104卷 / 05期

关键词：

D O I：

10.1103/PhysRev.104.1242

中图分类号：

O4 [物理学];

学科分类号：

0702 ;

摘要：

引用

页码：1242 / 1245

页数：4

共 12 条

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