A SYSTEM FOR DETERMINING MASS ENERGY OF PARTICLES INCIDENT ON A SUBSTRATE IN A PLANAR DIODE SPUTTERING SYSTEM

被引：122
作者：
COBURN, JW
机构：
来源：
REVIEW OF SCIENTIFIC INSTRUMENTS | 1970年 / 41卷 / 08期
关键词：
D O I：
10.1063/1.1684763
中图分类号：
TH7 [仪器、仪表];
学科分类号：
0804 ; 080401 ; 081102 ;
摘要：
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页码：1219 / &
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