ELECTRON-BEAM TESTING OF INTEGRATED-CIRCUITS

被引：1
|
作者：
REHME, H
机构：
[1] Electron Optical Analysis Group of Siemems AG, Forschungs Laboratorien, D-8000 München 83
来源：
PHYSICS IN TECHNOLOGY | 1979年 / 10卷 / 03期
关键词：
D O I：
10.1088/0305-4624/10/3/I02
中图分类号：
O4 [物理学];
学科分类号：
0702 ;
摘要：
Discusses nondestructive testing of LSI circuits by means of electron beam probes. The principles of voltage contrast pattern measurements, stroboscope techniques, quantitative voltage measurement and measurement of voltage against time are outlined and the design of a complete electron-beam test system is illustrated. The applications of electron beam testing to failure analysis when electrical measurements have shown an IC to be defective, and to function testing when circuit elements of a newly developed IC have to be checked are described.
引用
收藏
页码：97 / 103
页数：7
相关论文
共 50 条
  • [31] LOGIC TESTING OF INTEGRATED-CIRCUITS
    ROBACH, C
    SAUCIER, G
    ONDE ELECTRIQUE, 1978, 58 (12): : 842 - 849
  • [32] LASER TESTING OF INTEGRATED-CIRCUITS
    SMITH, JG
    OLDHAM, HE
    IEEE JOURNAL OF SOLID-STATE CIRCUITS, 1977, 12 (03) : 247 - 252
  • [33] HOLOGRAMS FOR OPTICAL INTERCONNECTS FOR VERY LARGE-SCALE INTEGRATED-CIRCUITS FABRICATED BY ELECTRON-BEAM LITHOGRAPHY
    FELDMAN, MR
    GUEST, CC
    OPTICAL ENGINEERING, 1989, 28 (08) : 915 - 921
  • [34] EVALUATION TESTING OF INTEGRATED-CIRCUITS
    HOMAN, RA
    ROSSMAN, MW
    PROCEEDINGS ANNUAL RELIABILITY AND MAINTAINABILITY SYMPOSIUM, 1975, (JAN28): : 372 - 376
  • [35] AUTOMATIC TESTING OF INTEGRATED-CIRCUITS
    BETTE, HP
    ELECTRONICS AND POWER, 1977, 23 (05): : 380 - 384
  • [36] FORMATION OF CRYSTALLINE SILICON LAYERS FOR 3-DIMENSIONAL INTEGRATED-CIRCUITS USING DUAL ELECTRON-BEAM RECRYSTALLIZATION
    MCMAHON, RA
    HASKO, DG
    WALLEY, SM
    AHMED, H
    BARFOOT, KM
    HOPPER, GF
    GODFREY, DJ
    JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1986, 133 (03) : C95 - C95
  • [37] EFFECTIVE TESTING OF DIGITAL INTEGRATED-CIRCUITS
    PADWICK, GC
    SOLID STATE TECHNOLOGY, 1972, 15 (03) : 46 - &
  • [38] AUTOMATIC TESTING INSTRUMENT FOR INTEGRATED-CIRCUITS
    SIMONINLAURENT, JP
    ACTA CIENTIFICA VENEZOLANA, 1978, 29 : 117 - 117
  • [39] TESTING AND DEBUGGING CUSTOM INTEGRATED-CIRCUITS
    FRANK, EH
    SPROULL, RF
    COMPUTING SURVEYS, 1981, 13 (04) : 425 - 451
  • [40] AUTOMATIC TESTING OF COMPLEX INTEGRATED-CIRCUITS
    LIVINGSTONE, AW
    POST OFFICE ELECTRICAL ENGINEERS JOURNAL, 1977, 70 (OCT): : 161 - 167
12345