SIMULTANEOUS DETERMINATION OF DISPERSION-RELATION AND DEPTH PROFILE OF THORIUM FLUORIDE THIN-FILM BY SPECTROSCOPIC ELLIPSOMETRY

被引：40
作者：
KIM, SY
VEDAM, K
机构：
[1] Pennsylvania State Univ, United States
来源：
THIN SOLID FILMS | 1988年 / 166卷 / 1-2期
关键词：
D O I：
10.1016/0040-6090(88)90394-X
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
26
引用
收藏
页码：325 / 334
页数：10
相关论文
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