AUGER-ELECTRON SPECTROSCOPY OF COMPOUNDS IN THE SI-TI-C SYSTEM - CHARACTERIZATION OF SI-TI-C MULTIPHASED MATERIALS OBTAINED BY CVD

Auger peak positions and line shapes analyses of the SiLVV, SiKLL, CKVV and TiLMM transitions for reference compounds: Ti, Si, SiC, TiC, TiC0.72, TiSi2, Ti5Si3(C) and Ti3SiC2, belonging to the ternary Si-Ti-C system have been performed. The results show that there are sufficient differences in Auger peak positions and line shapes to allow compounds identifications. The Auger line shapes of the CKVV transitions for Ti3SiC2 and Ti0.57Si0.33C0.1 (carbon solid solution in Ti5Si3) were found to be characteristic of carbon bonded to titanium. The TiL3M23M45 transition was found to be very sensitive to changes in the nature of the compounds. The spectra recorded for the reference compounds were used to characterize Si-Ti-C multiphased materials obtained by CVD. SiC-X(X = TiSi2,Ti3SiC2, TiC + C) mixtures were identified.