AN IMPROVED METHOD FOR NUMERICAL-ANALYSIS OF POINT ELECTRON AND ION-SOURCE OPTICS

被引：23
|
作者：
KANG, NK
ORLOFF, J
SWANSON, LW
TUGGLE, D
机构：
来源：
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY | 1981年 / 19卷 / 04期
关键词：
D O I：
10.1116/1.571172
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
引用
收藏
页码：1077 / 1081
页数：5
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