AN IMPROVED METHOD FOR NUMERICAL-ANALYSIS OF POINT ELECTRON AND ION-SOURCE OPTICS

被引:23
作者
KANG, NK
ORLOFF, J
SWANSON, LW
TUGGLE, D
机构
来源
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY | 1981年 / 19卷 / 04期
关键词
D O I
10.1116/1.571172
中图分类号
O59 [应用物理学];
学科分类号
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页码:1077 / 1081
页数:5
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