AN IMPROVED METHOD FOR NUMERICAL-ANALYSIS OF POINT ELECTRON AND ION-SOURCE OPTICS

被引：23
|
作者：
KANG, NK
ORLOFF, J
SWANSON, LW
TUGGLE, D
机构：
来源：
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY | 1981年 / 19卷 / 04期
关键词：
D O I：
10.1116/1.571172
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
引用
收藏
页码：1077 / 1081
页数：5
相关论文
共 50 条
  • [1] IMPROVED FORM OF OSCILLATING ELECTRON ELECTROSTATIC ION-SOURCE FOR ION ETCHING
    GHANDER, AM
    FITCH, RK
    VACUUM, 1974, 24 (10) : 483 - 487
  • [2] ION OPTICS IMPROVEMENTS TO A MULTIPLE APERTURE ION-SOURCE
    GARDNER, WL
    WHEALTON, JH
    BARBER, GC
    BLUE, CW
    DAGENHART, WK
    HASELTON, HH
    KIM, J
    MENON, MM
    PONTE, NS
    RYAN, PM
    SCHECHTER, DE
    STIRLING, WL
    TSAI, CC
    WRIGHT, RE
    REVIEW OF SCIENTIFIC INSTRUMENTS, 1981, 52 (11): : 1625 - 1628
  • [3] AN IMPROVED ION-SOURCE FOR ION-IMPLANTATION
    SAMPAYAN, SE
    FRISA, LE
    KING, ML
    MOORE, RA
    JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 1988, 6 (04): : 1066 - 1072
  • [4] IMPROVED ION-SOURCE FOR USE WITH OXYGEN
    GUARNIERI, CR
    RAMANATHAN, KV
    YEE, DS
    CUOMO, JJ
    JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 1988, 6 (04): : 2582 - 2583
  • [5] A LINEAR ION OPTICS MODEL FOR EXTRACTION FROM A PLASMA ION-SOURCE
    DIETRICH, J
    NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION A-ACCELERATORS SPECTROMETERS DETECTORS AND ASSOCIATED EQUIPMENT, 1987, 262 (2-3): : 163 - 169
  • [6] ELECTRON BACKSTREAM TO THE SOURCE PLASMA REGION IN AN ION-SOURCE
    OHARA, Y
    AKIBA, M
    ARAKAWA, Y
    OKUMURA, Y
    SAKURABA, J
    JOURNAL OF APPLIED PHYSICS, 1980, 51 (07) : 3614 - 3621
  • [7] AN IMPROVED SURFACE-IONIZATION ION-SOURCE
    CESARIO, J
    BOULIN, Y
    LANDEAU, B
    INTERNATIONAL JOURNAL OF MASS SPECTROMETRY AND ION PROCESSES, 1983, 46 (JAN): : 35 - 38
  • [8] NUMERICAL MODELING OF A COMPACT ECR ION-SOURCE
    GROTJOHN, TA
    REVIEW OF SCIENTIFIC INSTRUMENTS, 1992, 63 (04): : 2535 - 2537
  • [9] AN IMPROVED IONIZER FOR THE ETH POLARIZED ION-SOURCE
    SCHMELZBACH, PA
    GRUEBLER, W
    KONIG, V
    JENNY, B
    HELVETICA PHYSICA ACTA, 1980, 53 (02): : 316 - 316
  • [10] ORSAY ELECTRON-BEAM ION-SOURCE
    ARIANER, J
    GOLDSTEIN, C
    IEEE TRANSACTIONS ON NUCLEAR SCIENCE, 1976, 23 (02) : 979 - 986
12345